In Situ Atomic/Molecular Layer-by-Layer Deposition of Inorganic–Organic Coordination Network Thin Films from Gaseous Precursors
نویسندگان
چکیده
منابع مشابه
Atomic layer deposition (ALD): from precursors to thin film structures
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3 Preface 4 List of publications 5 List of symbols and abbreviations 6
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ژورنال
عنوان ژورنال: Chemistry of Materials
سال: 2016
ISSN: 0897-4756,1520-5002
DOI: 10.1021/acs.chemmater.6b02496